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The restraint values of frequency spectrum(vacant state)
The scales of temperature and humidity in clean room
| Room property |
Temperature(℃) |
humidity(%) |
| Winter |
Summer |
Winter |
Summer |
| Temperature and humidity required clean room |
Determined by the production technique |
| No temperature and humidity required clean room |
20-22 |
24-26 |
30-50 |
50-70 |
| The room for people purification and living |
16-20 |
26-30 |
|
|
Air flow pattern and air volume(static state)
| Air cleanliness class
|
Air flow pattern |
Average air speed(m/s)
|
Air change rate(h-1)
|
|
1-4 |
Non-unidirectional flow |
0.3-0.5 |
- |
| 5 |
Non-unidirectional flow |
0.2-0.5 |
- |
| 6 |
Unidirectional flow |
- |
50-60 |
| 7 |
Unidirectional flow |
- |
15-25 |
| 8-9 |
Unidirectional flow |
- |
10-15 |
Note：①Air change rate is fit for the clean room whose height is less than 4.0m.
②If there are few people in the room, or heat sources are not enough, lower limit value will be used.
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